Design and Verification of Geometric Roughness Standards by Reverse Engineering

In order to ensure a reliable calibration of surface topography measuring instruments the use of practical calibration strategies is required. This requirement can be fulfilled when measurement standards with a defined surface structure in accordance to the later obsessed application are used. Different examples for the design and manufacturing of accordant measurement standards have been investigated by the authors. Within this publication a generic reverse engineering approach for the design of geometrical measurement standards is deducted from these results. The physical effects that occur because of the manufacturing with an ultraprecision turning machine and the sampling of the measurement standards are mathematically inversed and considered. The practical abilities of the approach are illustrated exemplarily. These theoretical considerations for the design can be verified experimentally by the manufacturing of the samples with an ultra-precision turning process. In doing so, the high precision of the new design approach can be validated. The examinations confirm the universality of the reverse engineering approach for the design of measurement standards.