Influence of Abrasive Particle Movement in Micro USM

Ultrasonic machining (USM) is known for its ability of processing hard and brittle materials such as silicon, glass and ceramics. Micro USM is used to generate micro features in these materials. In micro USM, material is removed using a tool that impacts abrasive particles into the workpiece, chipping material away from the workpiece. Abrasive particles are distributed randomly in the machining area. Their movement affects the profile of the machined surface. In this study, experiments are carried out to investigate the influence of abrasive particles on the profile of machined surface by micro USM. It was found that machined surface profiles show convex or concave shapes. The profile is affected by amplitude of vibration, diameter of tool and the depth of hole.