Highly Integrated Piezo-Hydraulic Feed Axis

Currently used micro-machines are mostly based on macro machine tool principles. This leads to an unfavorable ratio of build and work space and also to high moving masses in comparison to the workpiece mass. To address these disadvantages it is necessary to develop new approaches for micro machines, micro machine components and new kinematic chains especially adapted to the requirements of micromachining. Therefore a new feed unit is designed featuring a highly integrated piezo-hydraulic feed axis, a parallel kinematic and a millimeter based radar measurement system. In this paper the design approach and the characterization of the compact highly integrated piezo-hydraulic feed axis is presented.