Study on the vibration displacement distribution of a circular ultrasonic motor stator

• We present a theoretical model of the displacement distribution of a circular stator.
• We construct an USM with the circular stator and a holographic interferometry system.
• We conducted measurements by the holographic interferometer and a laser vibrometer.
• We estimated the displacement distribution by a numerical simulation (FEA).
• All the results agree with each other within the range of a few percent.

In this paper is presented a theoretical consideration on the stator’s displacement distribution, which is one of the most important problems in defining the structure of a circular ultrasonic motor stator. The results are compared with ones obtained utilizing a holographic interferometer, a laser vibrometer and FEM (finite element method) simulation. They are in good agreement with each other.