ZnO thin film with nanorod arrays applied to fluid sensor

► ZnO guiding layer with nanorods grown on a quartz substrate is a novel structure for fluid sensor appliation. ► Sensors use one port resonator element. ► Optimum length of ZnO nanorod arrays increases the sensitivity of flow rate. ► Optimum thickness of ZnO films contributes a linear response between the flow rate and the return loss.