Modeling of MEMS resonator piezoelectric disc by means of an equicharge current source method

• A Legendre polynomial model has been used previously with a voltage source to model full electrode resonators.
• The Legendre polynomial method with voltage source is not able to model partially electroded resonators.
• A Legendre polynomial method with an equicharge source is proposed to model partially electroded resonator.

The Legendre polynomial method has been extended to the modeling of MEMS resonator disc with current excitation (equicharge current source). Formulation is given that allows the electric current source to be taken into account. A unique formalism has been developed which allows for both harmonic and modal analyses. Numerical results such as normalized electric input impedance, resonant and anti-resonant frequencies, dispersion curves and displacement profiles are presented and compared with those obtained by using voltage excitation in order to check the accuracy and range of applicability of the proposed approach.