Micromachined high frequency PMN-PT/epoxy 1–3 composite ultrasonic annular array

This paper reports the design, fabrication, and performance of miniature micromachined high frequency PMN-PT/epoxy 1–3 composite ultrasonic annular arrays. The PMN-PT single crystal 1–3 composites were made with micromachining techniques. The area of a single crystal pillar was 9 × 9 μm. The width of the kerf among pillars was ∼5 μm and the kerfs were filled with a polymer. The composite thickness was 25 μm. A six-element annular transducer of equal element area of 0.2 mm2 with 16 μm kerf widths between annuli was produced. The aperture size the array transducer is about 1.5 mm in diameter. A novel electrical interconnection strategy for high density array elements was implemented. After the transducer was attached to the electric connection board and packaged, the array transducer was tested in a pulse/echo arrangement, whereby the center frequency, bandwidth, two-way insertion loss (IL), and cross talk between adjacent elements were measured for each annulus. The center frequency was 50 MHz and −6 dB bandwidth was 90%. The average insertion loss was 19.5 dB at 50 MHz and the crosstalk between adjacent elements was about −35 dB. The micromachining techniques described in this paper are promising for the fabrication of other types of high frequency transducers, e.g. 1D and 2D arrays.

► We made high frequency PMN-PT/epoxy 1–3 composite ultrasonic annular arrays.
► A novel electrical interconnection strategy for density array was implemented.
► The micromachining techniques are promising for making high frequency transducers.