A lateral field excited (yxl)88° LiTaO3 bulk acoustic wave sensor with interdigital electrodes

► LFE bulk acoustic wave on thickness-shear mode is excited by interdigital electrodes. ► The effective lateral exciting electric field direction of (yxl)88° LiTaO3 plate is 0°. ► (yxl)88° LiTaO3 bulk acoustic wave sensors with interdigital electrodes are designed. ► The sensors with interdigital electrodes show superior electrically sensitivity.