Optimization of electrode size for aluminum-nitride matrix ultrasonic transducers in the frequency range above 200Â MHz

► A top electrode size optimization method for a thin film ultrasonic transducer is proposed. ► The optimization rule is based on the maximum transmission coefficient and the stored power. ► The working frequency of the transducer is in the frequency range above 200MHz. ► Simulation and experiment with different electrode sizes attain the optimal electrode size.