Numerical and experimental investigation of kerf depth effect on high-frequency phased array transducer

► The effect of kerf depth on the performances of array transducers is analyzed. ► The properties of partly-cut array are acceptable. ► The fabrication of partly-cut array is investigated. ► The limitation of minimum pitch is explored based on 36°/Y-cut LiNbO3 crystals. ► The fabricated array is characterized by crosstalk and electrical impedance.