Microstructure and magnetic properties of Fe72.5Si14.2B8.7Nb2Mo1.5Cu1.1Fe72.5Si14.2B8.7Nb2Mo1.5Cu1.1 thin films

• Thin films of Fe72.5Si14.2B8.7Nb2Mo1.5Cu1.1Fe72.5Si14.2B8.7Nb2Mo1.5Cu1.1 alloy were studied.
• Grain size changes were shown by means of XRD methods.
• Effect of annealing temperature and film thickness on magnetic properties were discussed.

This paper surveys structure and magnetic properties of the thin films with thicknesses of 30, 70, 100 and 200 nm, prepared by high-frequency ion-plasma sputtering of Fe72.5Si14.2B8.7Nb2Mo1.5Cu1.1Fe72.5Si14.2B8.7Nb2Mo1.5Cu1.1 target onto monocrystalline Si substrates. As-deposited films exhibited the roentgen-amorphous state and in-plane induced magnetic anisotropy. Their crystallization and drastic growth of the grains up to 40 nm at 460 °C were revealed and examined by X-ray diffraction methods. Among the measured magnetic properties of the films, the magnetic anisotropy and coercivity were stressed. Their changes with the annealing temperature and film thickness were discussed. The influence of the surface roughness on the coercivity was also investigated with atomic force microscopy.