Nanocomposite L10 FePt-SiNx and FePt-SiNx-C films with large coercivity and small grain size on a TiN intermediate layer

► FePt films with large coercivity and small grain size were obtained. ► C doping could increase the out-of-plane coercivity and improve the isolation. ► All FePt samples showed a high out-of-plane coercivity and low in-plane coercivity.