Comparison of the soft magnetic properties of permalloy and conetic thin films

The soft magnetic properties of the substrate/[non-buffer or buffer Ta]/[permalloy (Ni80Fe20) or conetic (Ni77Fe14Cu5Mo4)]/Ta prepared by ion beam sputter deposition are investigated. The value of the surface resistance of the conetic film is twice as high as that of the permalloy film. The value of the coercivity and magnetic susceptibility of the conetic film decreased by 25% and doubled relative to that of the permalloy film. The coercivity, with a value of 0.12 Oe, and the magnetic susceptibility, with a value of 1.2×104 for the conetic film, are suitable for soft magnetic biosensor applications.