Playback performance and microstructure of sputtered tape media formed by facing targets sputtering

Sputtered tape media of a CoPtCr-SiO2 magnetic layer with a Ru underlayer was fabricated on a thin Aramid film by a facing targets sputtering (FTS) system at room temperature with no cooling. Transition electron microscope (TEM) images show columnar epitaxial growth of hcp-CoPtCr(1 0 0) plane on hcp-Ru(1 0 0). Average grain diameter of 10.2 nm with dispersion of 20.2% was obtained from TEM images. Enrichment of Co and Pt inside grains and segregation of Cr and Si to boundary were confirmed by point energy dispersive spectroscopy (EDS) measurements. Playback performance test on sputtered sample indicated that SNR is higher and PW50 value is lower than that of commercial coated tapes. These good playback properties could come from fine and isolated grain structure of magnetic layer of sputtered sample, as observed by TEM.