Effect of pattern shape on etching wall profile in slider fabrication

The effect of pattern shape on etching wall profile in slider fabrication is studied. The testing results show: (1) the wall profile of round pattern is steeper than that of long rectangular; (2) for round patterns, the smaller the radius is, the steeper the wall profile is; (3) the profile of outer angle is steeper than that of inner angle. The flying height offset caused by wall profile with different shapes can be 8% of total flying height, so it is necessary to consider the effect of pattern shape on etching wall profile in ABS design, especially for ultra low flying height slider.