Resin-bonded permanent magnetic films with out-of-plane magnetization for MEMS applications

Resin-bonded permanent magnets with out-of-plain direction of magnetization and improved magnetic properties for magnetic MEMS actuator have been created. The material investigated consists of magnetically anisotropic strontium ferrite particles embedded into epoxy resin matrix upto a volume loading of 80%. Intrinsic coercivity Hci of 6000 Oe (480 kA/m), residual magnetic flux density Br up to 4000 G (0.4 T) and maximum energy product (BH)max of 3.0 MG Oe (23.6 kJ/m3) have been attained due to magnetic-field-induced alignment of the ferrite particles during curing process.