Fabrication of a solenoid-type inductor with Fe-based soft magnetic core

A solenoid-type inductor was fabricated by MEMS (Microelectromechanical systems) technique. The fabrication process uses UV-LIGA, dry etching, fine polishing, and electroplating technique to achieve high performance of the solenoid-type inductor. Fe-based soft magnetic thin film was sputtered as the magnetic core, and polyimide was used as the insulation materials. The inductor was in size of 4×4 mm with coil width of 20 μm and space of 35 μm. The inductance is 1.61 μH at a frequency of 5 MHz with the maximum quality factor of 1.42.