کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1805053 | 1024667 | 2006 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Fabrication of solenoid-type inductor with electroplated NiFe magnetic core
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
فیزیک و نجوم
فیزیک ماده چگال
پیش نمایش صفحه اول مقاله
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چکیده انگلیسی
Solenoid-type inductor with ultra-low profile was fabricated by MEMS (Microelectromechanical systems) technique. NiFe film was electroplated as the magnetic core, and polyimide with a low relative permittivity was used as the insulation material. In the fabrication process, UV-LIGA, dry etching, fine polishing and electroplating technique have been adopted to achieve high performance of the solenoid-type inductor. The inductor was in size of 1.5 mm×0.9 mm×0.1 mm with coil width of 20 μm and aspect ratio of 5:1. The inductance and the quality factor were 0.42–0.345 μH and 1.8–5.3 in the frequency range of 1–10 MHz, respectively.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Magnetism and Magnetic Materials - Volume 305, Issue 1, October 2006, Pages 207–211
Journal: Journal of Magnetism and Magnetic Materials - Volume 305, Issue 1, October 2006, Pages 207–211
نویسندگان
Xiao-Yu Gao, Ying Cao, Yong Zhou, Wen Ding, Chong Lei, Ji-An Chen,