MFM observation of spin structures in nano-magnetic-dot arrays fabricated by damascene technique

Regularly aligned arrays of magnetic nano dots buried in silicon wafers have been fabricated using damascene technique with the help of electron beam lithography. Arrays of square, rectangular, cross-shaped and Y-shaped structures of submicron size have been obtained. Spin distributions have been observed by means of magnetic force microscopy and analyzed by a micromagnetic simulation with Landau–Lifshitz–Gilbert equations. Importance of magnetostatic interactions working between adjacent dots has been elucidated.