Influence of the temperature of positive ions on the sheath formation and parameter space region in magnetized electronegative plasmas

• Obtaining positive ion flux at sheath edge as a function of magnetic field.
• The magnetic field effects to the oscillations appears for higher values of γ.
• Obtaining the parameter space region in magnetized electronegative for thermal ions.
• By increasing the positive ion temperature, the presheath thickness increases.
• In the presence of the hot positive ions, influence of the magnetic field vanishes.

The parameter space regions and the sheath formation in an electronegative discharge in the presence of thermal positive ions and oblique magnetic field are investigated. It is assumed that the negative species are in thermal equilibrium and the positive ions have a finite temperature. Three regimes of uniform, multilayer stratified and pure stratified are found as functions of positive and negative ion temperature, electronegativity and the magnetic field. The influence of positive ion temperature in the presence of magnetic field on the profiles of the positive ion density, positive ion velocity and electric potential are investigated. The positive ion flux at the sheath edge as a function of magnetic field is obtained for different collisionality and positive and negative ion temperatures. Finally, the influence of the magnetic field, collision frequency and the positive ion temperature on the parameter space regions are discussed.