کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1861160 1037491 2008 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Breakdown magnetic field in an inductively coupled plasma
موضوعات مرتبط
مهندسی و علوم پایه فیزیک و نجوم فیزیک و نجوم (عمومی)
پیش نمایش صفحه اول مقاله
Breakdown magnetic field in an inductively coupled plasma
چکیده انگلیسی

The Paschen curve shows that the breakdown voltage over a gap is a non-linear function of the product of the gas pressure and the gap distance for plasmas which are generated inside an electric field driven source. The Paschen breakdown relationship does not depend on the applied frequency and covers secondary emission at the electrodes of the discharge. Adapting the Paschen curve, a breakdown curve for a time-dependent magnetic field, typical for inductively coupled plasmas which sources are without electrodes, is examined here. It is shown that in this case the magnetic field breakdown curve does depend on the applied frequency.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Physics Letters A - Volume 372, Issue 41, 6 October 2008, Pages 6280–6283
نویسندگان
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