کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1862134 | 1530601 | 2013 | 6 صفحه PDF | دانلود رایگان |
The influence of excitation frequency (13.56–96 MHz) on the characteristics of capacitively coupled argon plasma is investigated by means of Langmuir probe and a high-voltage probe. Measurements are performed in argon pressure of 40 and 60 mTorr at a fixed discharge voltage Vpp=200 VVpp=200 V. The measured electron energy distribution function EEPFs are a bi-Maxwellian type irrespective of the driving frequency and gas pressure. The electron density and temperatures show peak over frequency range of 54–72 MHz, beyond which it decreases. The non-monotonic dependences of plasma parameters with driving frequency were interpreted in terms of excited surface wave excited at the powered electrode.
► Driving frequency effect on the EEPF of Capacitive discharge in argon is investigated.
► The EEPFs are a bi-Maxwellian type irrespective of the exciting frequency and gas pressure.
► The electron density and temperatures show peak over frequency range of 54–72 MHz.
► Two interface model analyses suggest propagation of SW on the powered electrode.
Journal: Physics Letters A - Volume 377, Issues 3–4, 3 January 2013, Pages 297–302