Boron distribution in the subsurface region of heavily doped IIb type diamond

For the first time investigations of the boron distribution in the subsurface region of HPHT boron-doped diamond that is promising for applications in electronics were carried out by X-ray photoelectron (XPS) and Raman spectroscopy. It was found from XPS data that the boron content decreased gradually more than one order of magnitude in depth of surface. The first-principle calculations have shown that the Raman polarizability in the crossed polarization configuration should increase considerably with boron doping. The Raman spectra from as-grown and polished surfaces of heavily boron-doped diamond are discussed in the context of theoretical results.