The Source of soft X-ray based on Low-energy Vacuum Spark

The source of X-ray radiation with quantum energy in the range hν = 1÷10 keV was developed for interaction of x-ray with matter and modification of solid surface. It was based on vacuum spark discharge with laser-triggering. The comprehensive study of X-rays imaging, quantum energy and temporal characteristics was carried out. Correlated estimates of the temperature of the investigated plasma based on moderate powerful vacuum discharge were obtained using the two methods in the case of low-stored energy (E≤1 J).