Digital Photonic Production of Micro Structures in Glass by In-Volume Selective Laser-Induced Etching using a High Speed Micro Scanner

Digital photonic production of 3D microfluidic devices and assembled micro mechanics inside fused silica glass is carried out using ISLE directly from digital CAD data. To exploit the potential productivity of new high average power fs-lasers >150 W a modular high speed scanning system has been developed. Acousto-optical beam deflection, galvo-scanners and translation stages are controlled by CAM software. Using a lens with 10 mm focal length a focus radius of 1 μm is scanned with a velocity of 12 m/s on 400 μm track radius enabling the up-scaling of the ISLE- process using fs-laser radiation with up to 30 W.