Neutron Detector Design Based on ALD Coated MCP

In this paper, we research the efficiency of thermal neutron detection for two kinds of micro channel plates (MCP): natGd2O3 coated MCP and natGd doped MCP. Monte Carlo simulation results show that both MCPs can achieve high detection efficiency for 25.3meV neutron of about 70% and 60% respectively. The spatial resolution of them is better than 100 μm. Atomic layer deposition (ALD) technique is used to implement the natGd2O3 film coating process, and ∼100 nm natGd2O3 film on the inner surface of MCP pores has been realized.