Research of Structure and Technology for the Micro-Machined Airflow Inclinometer

This paper reported a sensing mechanism of carrier attitude angle with the micro-machined airflow inclinometer, it utilized fluid mechanics and related theories to design the sensitive structure, analyze and certify gas pendulum in a micro-structure hermetic chamber, We used computer aided design and simulation software MEMSPro to design sensing structure layout,and produced in MEMS processing methods. The Micro-machined airflow inclinometer installed on optical dividing head to test. Through the compensation, ± 45° can be realized Nonlinear 1% or less. The sensor has a strong anti-vibration and impact ability, a simple structure and low cost.