Experimental and numerical optimization of beam shapes for short-pulse ultraviolet laser cutting processing

In this work the effect of elliptical beam shapes on cutting performance of silicon is studied experimentally using a Diode Pumped Solid State Q-switched UV laser operating at the wavelength of 355 nm. Elliptical beams are investigated by varying scanning speed, repetition rate and average output power. It is shown that a short elliptical beam with 6×230 μm dimension forms a deeper groove at higher cutting speed and lower average output power compared to a longer elliptical beam. A numerical model of the laser cutting process is also described. Some validation results for single and multi-pulse cutting are shown.