Material tester with static and dynamic micro forces

Material testers with static and dynamic micro forces based on the Levitation Mass Method (LMM) are reviewed. In the LMM, the inertial force of a mass levitated using a pneumatic linear bearing is used as the reference force applied to the objects under test, such as force transducers, materials or structures. The inertial force of the levitated mass is measured using an optical interferometer. The previous achievements and the future prospects on the methods of generating and measuring the static and dynamic micro-Newton level forces based on the LMM are discussed.