Fabrication of Microhater by Selective Laser Sintering of Ruthenium Dioxide Micropowder

During the topology creation by the selective laser sintering method experimental samples of microheater based on ruthenium dioxide micro-powder were made. The resulting structures were used as microheaters to measure changes in the thermal conductivity of gases. A power comparison of standard platinum spiral element widely used in catalytic thermal sensors and microheater produced by the new technology showed the advantage of the latter.