Dry Process based Infrared Sensors with CNT Film Absorber

In this paper, we describe the fabrication and characterization of a front-side micromachined thermopiles consisting of a suspended membrane and a carbon nanotube (CNT) film absorber. Thermocouples of 52 pairs which are composed of phosphorous-doped silicon and aluminum were formed and connected in series. A CNT film collected by filter was transferred on hot junction. A CNT absorber has an absorptance of about 50% in the midinfrared region. The suspended membrane was fabricated by an isotropic silicon dry etching process with XeF2 gas at the front side of the substrates. The output voltage with the CNT film is found to be 250.2 mV at 7 mW of incident power, approximately 1.8 times higher than that of one without an absorber.