Development of the Vacuum Comparison Standard Device

The standard device of vacuum comparison is built compared the dynamic method, the static compared method and the static expansion method, this device combined three methods are to meet the wide range of calibrating vacuum gauge. It is used to calibrate 1×105∼5×10-4 Pa within the scope of various types of vacuum gauge. The characteristic of this equipment is a simple in structure, easy to operate, high efficiency, practicability of the vacuum standard. Especially suitable for a large number of routine calibrations, the device consists of turbo-molecular pump, calibration container, the standard vacuum gauge and metal expansion valves and other components, and its main technical specifications in line with the International Standards Organization (ISO) and the domestic vacuum standards.