Growth of High Quality Znmgo Films on Diamond Substrates

ZnMgO films were prepared at room temperature on freestanding diamond (FSD) substrates by co-sputtering. The Mg content was controlled by varying RF sputtering power of MgO and the effects of Mg contents on the properties of ZnMgO films were investigated. The results showed that the (0002) peak of ZnMgO shifted from 34.5° to 35.6° with the increasing sputtering power of MgO target. The UV-visible and PL spetra of ZnMgO films revealed that the bandgap of ZnMgO was approximately linear related to the sputtering power of MgO target.