Calibration of Pizeo Rotation Nano-positioning Stage by Digital Holography System

Pizeo rotation nano-positioning stage is used in many optics areas duo to its nano scale movement ability. But its Hysteresis loop trace influences it movement linearity and accuracy. In this paper, calibration of pizeo rotation nano-positioning stage is performed by digital holography (DH) technique. A hysteresis phenomenon is observed. The accuracy of the movement is tested. During the calibration, the axial measurement resolution and accuracy of digital holography is also demonstrated.