Characterization of Piezo rotation stage by multipoint diffraction strain sensor

Nano rotation stage is widely used as a miniature rotation platform. The high resolution of this device is helpful but it is at the expense of linearity. So the calibration is necessary before usage. In this paper we use the optical diffraction strain sensor to calibrate the nano rotation stage. The system setup and measuring principle of the optical diffraction strain sensor are introduced. In the experiment, a commercial rotation stage (NanoFlex™ 17 ASR 001) is used. The results of measured rotation angles versus driving voltages are shown. An obvious hysteresis phenomenon is measured when applying the driving voltage increasingly and then decreasingly. The measured results can be used for the calibration of this rotation stage.