Abrasive Particles Trajectory Analysis and Simulation of Cluster Magnetorheological Effect Plane Polishing

Kinematics model of abrasive particles for certain eccentric and linear interpolation swing uncertain eccentric, uncertain eccentricity of X direction and Y direction in plane polishing based on cluster magnetorheological(MR) effect are built and simulated by computer, and also obtain the influence law of key factors such as the speed ratio r of polishing disk and workpiece, the eccentricity e to polishing disk, the distance of abrasive particles P to the center of polishing disk, the ratio F of swing range A and swing speed V to polish quality. At last, polishing experiment for single crystal 6H-SiC is carried out on the experiment equipment of the cluster MR effect by selecting optimized parameters through the simulation results, which verified the correctness of the simulation results.