Tribological properties of DLC films prepared by magnetron sputtering

Two kinds of diamond-like carbon films containing Ti, C and Ti, Cr, C were prepared by magnetron sputtering PVD. The microstructure and elemental composition of the films were characterized by atomic-force microscope (AFM) and auger electron spectrometer (AES), the hardness and modulus were analyzed by nano-indentation, and the tribological properties of the DLC films sliding against GCr15 ball at various loads were measured on a universal reciprocating friction and wear tester. It was found that a compact and gradient diamond-like carbon film was formed on the Si surface by magnetron sputtering. Ti, C DLC films showed excellent wear resistance because of higher value of H/E, the friction coefficient was 0.1∼0.2 at various loads and the wear rate was in the level of 10-7mm3/m. Element Cr improved the hardness, the modulus and the roughness, but reduced the wear resistance of Ti, Cr, C DLC films.