Fabrication of YBCO-LSMO-YBCO Lateral Structure with AFM Lithography

We have tried to make the superconductor/half metal/superconductor (SC/HF/SC) Josephson junction to make clear a long range proximity effect. The structure was consisted of high-Tc superconductor YBa2Cu3O7-x and half metallic ferromagnet La0.7Sr0.3MnO3 thin films deposited by pulse laser deposition on SrTiO3(100) single crystal substrates. The SC/HF/SC lateral structure was made by scratching with the atomic force microscope (AFM) probe. We could cut the ditch which has 30 nm width and 50 nm depth. We have investigated the I-V and R-T measurements of the structure. The structure after the fabrication did not show the superconducting state and we could not find the Josephson current.