Femtosecond Laser-Induced Formation of Surface Structures on Silicon and Glassy Carbon Surfaces

The article reports about the results of experimental studying of pulsed laser irradiation of the surface of glassy carbon and silicon samples with different crystal plane orientation. Formation of periodical nanostructures on the irradiated silicon surface was registered. Significant dependence of characteristics of structures from crystal orientation was found. Surface structures on silicon (111) have deeper pores than on silicon (100) at equal conditions of laser action. The similar nanostructures were found on the surface of glassy carbon after interaction with femtosecond laser radiation.