Development of a Miniaturized Multisensory Positioning Device for Laser Dicing Technology

In this study we propose a multisensory laser tracker system for measuring and tracking the TCP (Tool Center Point) of e.g. high precision motion systems. An experimental platform composed of four tracker modules is developed in order to track the TCP of a linear positioning system based upon the length measurement (multi-lateration). Concepts and first devices for miniaturization of the tracker system are presented.