Plasma Monitoring during Laser Material Processing

Spectroscopic analysis of the emitted plasma during laser machining can provide valuable information on the relevant material reaction channels and removal rates. The aim of the study is the improvement of the laser micro machining results by means of laser-induced breakdown spectroscopy. Two applications in online monitoring and control are demonstrated: 1. optimization of laser beam focus repositioning on the work piece during trepanning; 2. depth control in selective thin film removal in multi layer systems.