کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
226719 | 464796 | 2016 | 6 صفحه PDF | دانلود رایگان |
• Electrically conductive carbon patterns (ECPs) from pitch were prepared by proton beam lithography and pyrolysis.
• Well-defined pith patterns were obtained by proton beam lithography at the optimized fluence.
• The pitch patterns were converted to the ECPs with imperfect graphitic structure by pyrolysis.
• The ECPs exhibited a low sheet resistance and a good electrical heating performance.
Electrically-conductive carbon patterns (ECPs) from cheap pitch thin films were fabricated using a simple proton beam lithography and pyrolysis. Well-defined negative-type pitch patterns were formed at the optimized fluence of 3 × 1015 ions cm−2, and then pyrolyzed at various temperatures to create ECPs. The precursory pitch patterns formed at the optimized conditions were successfully temperature-dependently converted to the ECPs by pyrolysis. The formed ECPs through pyrolysis at a higher temperature exhibited good electrical conductivity. Moreover, the ECPs exhibited good electric heating characteristics, demonstrating the possibility of using the ECPs as a cheap electric heating element.
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Journal: Journal of Industrial and Engineering Chemistry - Volume 39, 25 July 2016, Pages 188–193