کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
238704 465770 2008 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Metal copper films coated on microparticle substrates using an ultrasonic-assisted magnetron sputtering system
موضوعات مرتبط
مهندسی و علوم پایه مهندسی شیمی مهندسی شیمی (عمومی)
پیش نمایش صفحه اول مقاله
Metal copper films coated on microparticle substrates using an ultrasonic-assisted magnetron sputtering system
چکیده انگلیسی

Metal copper films were coated on micrometer silicon carbide (SiC) and polymer particles with different sizes using the ultrasonic-assisted magnetron sputtering system. The surface morphology, the chemical composition and the crystallization of the SiC and the polymer particles were characterized by the field emission scanning electron microscopy (FE-SEM), energy dispersive analysis of X-rays (EDAX) and X-ray diffraction (XRD) analysis before and after film deposition. The experiment results indicate that the copper films were successfully coated on SiC and polymer particles. The XRD results show that the copper films have a face centred cubic structure. It was found from the FE-SEM results that film growth of copper films is a three-dimensional island growth mode.

Metal copper films were coated on micrometer silicon carbide (SiC) and polymer particles with different sizes using the ultrasonic-assisted magnetron sputtering system. The surface morphology, the chemical composition and the crystallization of the SiC and the polymer particles were characterized by the field emission scanning electron microscopy (FE-SEM), energy dispersive analysis of X-rays (EDAX) and X-ray diffraction (XRD) analysis before and after film deposition. The experiment results indicate that the copper films were successfully coated on SiC and polymer particles. The XRD results show that the copper films have a face centred cubic structure. It was found from the FE-SEM results that film growth of copper films is a three-dimensional island growth mode.Figure optionsDownload as PowerPoint slide

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Powder Technology - Volume 187, Issue 3, 20 November 2008, Pages 239–243
نویسندگان
, ,