Dynamic response of sensor diaphragm with residual stress in contact with liquids

The dynamic response of a sensor diaphragm with residual stress in contact with a liquid is theoretically investigated in this paper. The liquid is assumed to be incompressible and inviscid. The acoustic radiation as the main source of energy dissipation in a medium virtually added the mass of the diaphragm and decreased the quality factor of the diaphragm. The effects of the residual stress on the added virtual mass and the quality factor of the diaphragm are presented. Finally, forced oscillations of the sensor diaphragm with residual stress in contact with a liquid are investigated. It is found that the requirements of high sensitivity and large vibration displacement are contradictory. The analysis and results are valuable for conducting the design of circular sensor diaphragms for biological applications.