کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
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287623 | 509576 | 2014 | 13 صفحه PDF | دانلود رایگان |
Predicting squeeze-film damping due to the air gap between the vibrating microstructure and a fixed substrate is crucial in the design of microelectromechanical system (MEMS). The amount of squeeze-film damping can be controlled by providing perforations in microstructures. In the past, to include perforation effects in squeeze-film damping calculations, many analytical models have been proposed. However, only the rectangular perforated microplates are considered in the previous works. There is lack of works that model the squeeze-film damping of circular perforated microplates. In fact, the circular perforated microplates are also common elements in MEMS devices.In this paper, the squeeze-film damping in a perforated circular rigid microplate is modeled using a modified Reynolds equation that includes compressibility and rarefaction effect. The pressure distribution under the vibrating plate is obtained using the Bessel series. Analytical expressions for the squeeze-film damping and spring constants have been found. For a flexible perforated circular microplate, based on Reyleigh’s method, this paper presents an approximate model to estimate the squeeze-film damping in the flexible plate vibrating in the fundamental mode. The accuracy of the present models is verified by comparing its results with the finite element method (FEM) results.
Journal: Journal of Sound and Vibration - Volume 333, Issue 9, 28 April 2014, Pages 2688–2700