کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
414494 680962 2012 7 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Fabrication and property analysis of a MEMS micro-gripper for robotic micro-manipulation
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر هوش مصنوعی
پیش نمایش صفحه اول مقاله
Fabrication and property analysis of a MEMS micro-gripper for robotic micro-manipulation
چکیده انگلیسی

The micro-gripper is an essential device in micro-manipulation. A new micro-gripper fabrication process using MEMS technology is developed for a robotic micro-manipulation system. The mechanical stiffness of this gripper is analyzed with the Pseudo-Rigid Body Model to estimate the grip force of these micro-grippers of various scales and materials. The validity of the proposed model is verified by simulations and experiments. An experimental robotic micro-manipulation system consisting of this micro-gripper and a precision manipulator is implemented, and an actual gripping test is conducted to evaluate the robotic manipulation system.


► Properties of a MEMS gripper made with Nickel and Silicon were analyzed.
► Fabrication process of a Nickel micro-gripper was proposed.
► Mechanical stiffness of this gripper is analyzed with the Pseudo-Rigid Body Model.
► An experimental robotic micro-manipulation system consisting of this micro-gripper and a precision manipulator is implemented.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Robotics and Computer-Integrated Manufacturing - Volume 28, Issue 1, February 2012, Pages 50–56
نویسندگان
, , , ,