کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
475135 699214 2015 9 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Cycle time analysis of dual-arm cluster tools for wafer fabrication processes with multiple wafer revisiting times
ترجمه فارسی عنوان
تجزیه و تحلیل زمان چرخه ابزار خوشه دو دست برای فرآیند تولید ویفر با چندین بار بازبینی مجدد
کلمات کلیدی
برنامه ریزی، ابزار خوشه، تولید نیمه هادی، شبکه پتری
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر علوم کامپیوتر (عمومی)
چکیده انگلیسی

For some wafer fabrication processes, the wafers need to visit some processing modules for a number of times, which is referred to as the revisiting process. With wafer revisiting, it is very complicated to analyze the cycle time of a dual-arm cluster tool. Due to the fact that atomic layer deposition (ALD) process is a typical revisiting process in the semiconductor industry, study is conducted on cycle time analysis of dual-arm cluster tools for the ALD process with multiple revisiting times. The system is modeled by a type of Petri net. With this model, it is revealed that the system may never reach a steady state. Based on this finding, a method is presented to analyze the cycle time and analytical expressions are derived to calculate the cycle time for different cases. Several illustrative examples are given to show the applications of the proposed approach.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Computers & Operations Research - Volume 53, January 2015, Pages 252–260
نویسندگان
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