3D patterning of silicon by contact etching with anodically biased nanoporous gold electrodes

3D patterning of silicon by contact etching with anodically biased nanoporous gold electrodes

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Electrochemistry Communications - Volume 76, March 2017, Pages 79-82

Encarnación Torralba, Mathieu Halbwax, Taha El Assimi, Marin Fouchier, Vincent Magnin, Joseph Harari, Jean-Pierre Vilcot, Sylvain Le Gall, Raphaël Lachaume, Christine Cachet-Vivier, Stéphane Bastide,