Computing of gas flows in micro- and nanoscale channels on the base of the Boltzmann Kinetic equation

The paper describes the methodology of computing gas flows in narrow micro- and nanoscale channels on the basis of finite-difference solution of the Boltzmann kinetic equation using the conservative projection method of collision integral calculation. Mathematical framework of the method is considered and the problem solving environment for calculation of the above mentioned flows is described. Examples of the flow calculations in the plane and 3D geometry are given.