کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
490841 719040 2015 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Design and Fabrication of an Electrode for Low-actuation-Voltage Electrowetting-on-Dielectric Devices
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر علوم کامپیوتر (عمومی)
پیش نمایش صفحه اول مقاله
Design and Fabrication of an Electrode for Low-actuation-Voltage Electrowetting-on-Dielectric Devices
چکیده انگلیسی

This paper presents the design and fabrication of an electrode for low-actuation-voltage electrowetting-on-dielectric (EWOD) devices. The electrode which takes advantage of a novel shape is used to develop an EWOD device. The fabrication process for the electrode and the device development includes laser exposure, wet developing, etching, and stripping. A dielectric layer of 5% (wt./wt.) Polyvinylidene difluoride (PVDF) is used for the electrode insulation. In addition, a very thin (50 nm) layer of Teflon is coated on the EWOD surface to provide hydrophobicity. It is observed that a thin and high dielectric-constant layer can reduce the actuation voltage in the EWOD device. An actuation voltage of 14.8 V was achieved by the EWOD device.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Procedia Technology - Volume 20, 2015, Pages 20-25